I'm working on electrowetting. I need to make a dielectric film over an electrode (probably Cu). So I want to know what dielectric materials would be best for this purpose. Suggest me 3 dielectric materials. These dielectric materials should be compatible with Cu electrode. Desirable properties of dielectric materials are:
High dielectric constant,
High breakdown voltage,
Low density of charge trap and pin hole
Low leakage current
I think practically there are several practical factors that may alter the answer.
Is the electrode micro/nanostructured?
What are the dimensions of the electrode?
What facilities/equipment do you have for the deposition of the dielectric material?
For nano/micro fabrication, multi-layer PECVD deposited SiNx is popular, as well as SU-8.
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