Can any one suggest me is it possible to make 10 nm Titanium nitride thinfilm into nano particles or nano islands using annealing process at lower temperature or please suggest me any route to do this process ?
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You could consider this technique
Article Production of nanopowders from physical vapor deposited film...
I hope you make a feedback to me with your results
Best wishes
The link below help
Chapter Fabrication of Plasmonic Crystalline Thin Film of Titanium N...
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