Using Reactive Ion Etching (RIE) to nanopattern transparent teflon (PTFE) films. Does anyone have experience/references/ or recipe recommendations?

10 October 2017 1 6K Report

I'm interested in nanopatterning transparent teflon sheets in a reactive ion etching process. I previously thought an O2 etch would be enough to etch PTFE since it is a polymer however after SEMing the surface does not appear to be changed. Does anyone have any references for etching teflon in an RIE or any recipe recommendations? The nanopatterns i am interested in fabricated would be anywhere from 200-300nm tall.

Thanks!

Hongjun Zeng

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