The CV curve for MOS capacitor gives a negative capacitance at high frequency (800 KHz and above). This is not the case for lower frequencies (less than 500KHz). I am measuring the density of interface traps for Si/SiO2 using the CV curve at high and low frequencies. If anyone knows why I am getting the negative capacitance and how can I solve the problem, it will be really helpful.

Thanks.

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