I need to find out the thickness of metal oxide layer on a metal using XPS data. How do I do this? Is there any free tool to find this out? And what is the logic used for the calculation?
1) Sputter profile while measuring the O 1s and metal peaks. This requires that your instrument can do sputter profiling and that it is properly calibrated for such work on the materials-system that you have.
2) Perform angle resolved XPS. This requires that your film is less than a few 100s of nm and that your instrument geometry supports proper angle-resolved measurements by design.
3) Use the mean free path differences of the O 1s and various metal peaks. This again requires that your film is thin (even less so than above).
The details behind all three methods are well-documented in technical articles and how-to resources, both on the Web and in hard journal or book resources. The third option is generally a first-estimate (less robust) compared to the other two. Folks otherwise swear by 1 or 2 depending on their personal experience/bias and/or the system at hand.
As for "free" tool ... The XPS instrument will have options for 1. For 2 and 3, you have to collect the data and use a data analysis package (Igor Pro, MatLab, or alternative yet equivalent "free" software).