Synthesis: creation of product through chemical reaction (eg synthesized nanoparticles from reduction reaction)
Deposition: Start with material and lay it down onto a surface either through aerosols (vapor) or chemical bonds (wet).
Growth: Seems to imply a seed unit on which other units will attach until a composite is formed. For example, many large nanoparticles are grown by beginning with smaller AuNP's as seeds, and having more gold atoms bind to them.
Synthesis: creation of product through chemical reaction (eg synthesized nanoparticles from reduction reaction)
Deposition: Start with material and lay it down onto a surface either through aerosols (vapor) or chemical bonds (wet).
Growth: Seems to imply a seed unit on which other units will attach until a composite is formed. For example, many large nanoparticles are grown by beginning with smaller AuNP's as seeds, and having more gold atoms bind to them.
Growth is the process, deposition is technique and synthesis is the chemical reaction that form new material
come to your example: NiO grown on Si by some deposition technique. I think, you can not say "NiO/Si synthesis". For chemical reaction, SYNTHESIS of Au nanoparticle is the correct way of representing.
Deposition and growth are usually leading to the similar process depending on the technique used, rather than temperature.
Both of them have a physical reaction. But, growth is associated with MBE and similar techniques, whereas deposition refers to others like PLD and ALD.