I have used SRIM but I couldn't find some parameters, like ion flux and temperature...., If there are other software to simulate ion irradiation on semiconductor devices?
There are many — GEANT4, PHITS, MCNP are the most common. Which one to use depends on which type of particle and energies you want to simulate, and what physical aspects of your problem you need the simulation to convey (energy deposition, particle flux, vacancy creation, etc.), as well as the source and transport medium geometries needed to adequately describe your problem.
There are many — GEANT4, PHITS, MCNP are the most common. Which one to use depends on which type of particle and energies you want to simulate, and what physical aspects of your problem you need the simulation to convey (energy deposition, particle flux, vacancy creation, etc.), as well as the source and transport medium geometries needed to adequately describe your problem.
Dear Dr. Moussaab Belarbi , what link you have given is free software or one need to purchase the package? if free then please elaborate how to install. Thank you.