Thin films, nano fabrications
Electrodeposition.
Recently, I found this article
http://onlinelibrary.wiley.com/doi/10.1002/anie.200350912/full
maybe can help you.
But why do you not want to use PVD deposition? the simplest method is thermal evaporation or magnetron sputtering.
The simplest method is to do EB Assisted thermal evaporation if the material availability is very less or else do the DC magnetron sputtering.
Daniel and Rajesh
I hope non vacuum methods are cheaper than PVD or EB evaporation specially when it comes to large scale industrial applications
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