Answer: Yes!

Before the advent of FIB samples have already been prepared for TEM investigations: powders, bulk samples, thin films in growth direction and perpendicular.

https://en.wikipedia.org/wiki/Transmission_electron_microscopy#Sample_preparation

These techniques should be available in the TEM laboratory and should be done by a qualified person.

Some books:

J. Ayache, et al., Sample Preparation Handbook for Transmission Electron Microscopy: Methodology

ISBN-10: 0387981810, ISBN-13: 978-0387981819

J. Ayache et al., Sample Preparation Handbook for Transmission Electron Microscopy: Techniques

ISBN-10: 1441959742, ISBN-13: 978-1441959744

The method you use for sample prep will depend on the nature of your sample. Is it in powdered form or a solid bulk material? I'm assuming it's in bulk form since you mention FIB. If so, another technique would be ion milling. This requires your sample to be fairly homogeneous, since you will be milling a hole through it and looking at the thinned material on the edges of the hole. If your sample is more heterogeneous and you are interested in looking at interfaces or relationships between phases, ion milling isn't the best option. For that you'd want FIB.

You already got advice on specimen preparation, I just want to say about possible artefacts on pictures you had attached. Using EDS mapping is one of the worst methods of determination whether some elements are present in your specimens. Everything your picture shows could be just background radiation, not real peaks from elements. Use spectra acquisition instead of mapping. Article X-ray Microanalysis Artifacts Visualized

Vladimir is correct, in theory. Your sample suggests a “particle” is being viewed. The maps themselves (if created at the same time), would seem to suggest a roughly similar quantity for every element you displayed. If each map was created independently, then the data suggests, you stopped collecting when the sample displayed similar density to the other analyses.

The kind of “background” I am thinking of (in Vladimir’sstatement) would likely be for a single element. Perhaps I am miss-understanding him.

However, the carbon map may be ’suggesting‘ some minor pocketing? Is that possible in your sample?, or perhaps some Carbon particle size variation? Or possibly some particle surface contamination?

Anyway, embedding and polishing of the sample, to thin film dimensions, has been used for many material types, to allow TEM observation. Too, some materials will allow thin sectioning to be done for TEM observation. But I cannot speak to your sample material specifically, having never handled it myself. I have done some types of ceramics this way, that and wafer polishing, … and electro polishing.

Dear Var St. Jeor , I am sorry, but you are wrong in most of your statements.

Only experience speaking.