The "normal" known youngs modulus of metals and ceramics are not transferable to layers with thickness less than 10-20 microns. So there is no data for e-modules for nanoscale layers. 

thanks Mr.Verlotski for your answer but I saw in some articles they calculated E for coatings with a thickness about 2-3 microns.

Yes, in technology of thin layers (1-5 microns) is often calculated with known E-modules. But in any such calculation are stresses in the layers of several GPa determined, that are not imaginable in "normal" materials. This is, among others, a proof that for thin layers completely different values for E-modules must be taken.

In nanoscale layers the matter is even more complex: normal mechanics (Hooke's law) no longer works here! The term "youngs modulus" lose the physical sense.

I appreciate you Mr.Verlotski. unfortunately in nano scale everything is complex. Even with accurate calculations it is impossible to receive to a right answer.

We calculate E-Modulus for thin films with the help of nanoindentation. But as mentioned by Mr. Verlotski, we have to mention the stresses in such films. Moreover, there are a number of other E-modulus calculation models for composite materials. I used another equation for multilayer coatings but may be this method is applicable for matrix phase. 

thanks Mr.Naveed for your answer. but I'm working with a PACVD system and I consider that we don't have significant residual stresses in PACVD coatings unlike PVD coatings. 

You can do the nanoindentation tests. It gives effective modulus and hardness.Go through below articles for more information. 

http://onlinelibrary.wiley.com/doi/10.1002/app.43532/full

http://www.sciencedirect.com/science/article/pii/S0032386116301227