Is some one know the process of reactive sputtering? Can some one recommend me the book for understanding the reactive sputtering?
"Sputtering by particle bombardent" Ed. R.Behrisch, Vol. 1 (http://bookfi.net/book/497304),
and 2, 3 for full study, but ...
There is no still good theory for the ultra low energy ion sputtering (
There are a lot of review articles and books published on reactive sputter deposition of thin films, see for example:
J.E. Greene, JVSTA 2017, Article Review Article: Tracing the recorded history of thin-film sp...
D. Depla et al, https://core.ac.uk/download/pdf/55744819.pdf
D. Depla and S. Mahieu, Reactive sputter deposition, Springer, http://www.ciando.com/img/books/extract/3540766642_lp.pdf
S. Berg, T. Nyberg, TSF 2005, https://is.muni.cz/el/1431/jaro2016/F8542/um/04_Berg__Modeling_of_Reactive_Sputtering.pdf
Apart from the book chapter and the book by D. Depla mentioned above. We recently published a tutorial paper about reactive magnetron sputtering:
Article Tutorial: Hysteresis during the reactive magnetron sputtering process
Also my PhD thesis can give some additional insight:
Thesis Modeling the reactive magnetron sputtering process
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