Is some one know the process of reactive sputtering? Can some one recommend me the book for understanding the reactive sputtering?
"Sputtering by particle bombardent" Ed. R.Behrisch, Vol. 1 (http://bookfi.net/book/497304),
and 2, 3 for full study, but ...
There is no still good theory for the ultra low energy ion sputtering (
There are a lot of review articles and books published on reactive sputter deposition of thin films, see for example:
J.E. Greene, JVSTA 2017, Article Review Article: Tracing the recorded history of thin-film sp...
D. Depla et al, https://core.ac.uk/download/pdf/55744819.pdf
D. Depla and S. Mahieu, Reactive sputter deposition, Springer, http://www.ciando.com/img/books/extract/3540766642_lp.pdf
S. Berg, T. Nyberg, TSF 2005, https://is.muni.cz/el/1431/jaro2016/F8542/um/04_Berg__Modeling_of_Reactive_Sputtering.pdf
Apart from the book chapter and the book by D. Depla mentioned above. We recently published a tutorial paper about reactive magnetron sputtering:
Article Tutorial: Hysteresis during the reactive magnetron sputtering process
Also my PhD thesis can give some additional insight:
Thesis Modeling the reactive magnetron sputtering process
Suppose we grow ( 111) NiO plane on thin film. We want all the momnets of NiO in one direction. What should we do if we donot apply external magnetic field to orient moments ( 111) direction.
11 December 2018 4,508 0 View
Can some one tell me the procedure to grow CoO single crystal ( 111) thin film using sputtering?
11 December 2018 4,421 3 View
In which substrate we can grow the NiO thin film 100 plane and 111 plane seperately using magnetron sputtering?
11 December 2018 8,495 0 View
01 January 1970 7,770 3 View
I have been getting a low plasma and no coating while doing rf sputtering of copper doped ZnS using a power of 140 watts and at pressure of 6.5x10-3 Mb.
07 August 2024 4,526 4 View
Hello everyone I am looking for one or some books for propertes and behaviors of stochastic fibre orientation composites. unfotunately I could not find any suitable reference for thias by...
04 August 2024 3,461 3 View
I am editing a book for Springer Nature on recent advancements and future trends in biomaterials for orthopedic and trauma applications, with a publication date slated for early next year. If you...
29 July 2024 5,015 9 View
Some educational books with practical exercises of the "Idrisi Selva" software, which have step-by-step visual training for predicting the change of land use/land cover and including the use of...
28 July 2024 4,168 0 View
I am experiencing this for the Bi2Se3 sputtering target. Initially, even if the target was 2:3 in Bi : Se, with a few sputtering runs, due to the high escaping tendency of selenium, the top layer...
23 July 2024 1,649 1 View
Several Complex Variables and Integral Formulas Dear researchers, how can we download this book? Please help?
22 July 2024 4,120 4 View
In the aquaculture and fish nutrition research field, a number of growth and somatic indexes are often used, including specific growth rate (SGR), feed conversion rate (FCR), protein efficiency...
22 July 2024 2,480 4 View
Hello I want to know about the sputtering condition of depositing FTO from target 95:5%. I tried with RF sputter in pressure 2.5Pa and 100 sccm Ar at room temperature but it showing no...
21 July 2024 1,680 2 View
Asking for recommendations about affordable publishing
17 July 2024 1,555 1 View
I read several information security books. How do I start writing anti-virus softwares ?
13 July 2024 8,180 1 View