I am trying to determine surface roughness of a curved surface of 100 micron length. I wish to segregate it into five equal parts and then determine the surface roughness of each part. The surface roughness should be of the order of
With a surface profile instrument as used in the semiconductor industry. For example: https://www.kla-tencor.com/Metrology/hrp-350.html
Hi Tribeni,
In order to help you addressing your issue, you may refer to these references:
- http://cdn.intechopen.com/pdfs/33450.pdf
- Appendix C from https://www.google.fr/url?sa=t&rct=j&q=&esrc=s&source=web&cd=1&cad=rja&uact=8&ved=0ahUKEwicrNXd0bDTAhWJPxoKHbHdDgwQFggkMAA&url=http%3A%2F%2Fbookshop.europa.eu%2Ffi%2Fthe-development-of-methods-for-the-characterisation-of-roughness-in-three-dimensions-pbEUNA15178%2Fdownloads%2FEU-NA-15178-EN-C%2FEUNA15178ENC_001.pdf%3Bpgid%3DIq1Ekni0.1lSR0OOK4MycO9B0000CKAKkEyD%3Bsid%3DYMhW6ywaa2VWuXjpnB3ITE4_ZxtQOI7ZHJg%3D%3FFileName%3DEUNA15178ENC_001.pdf%26SKU%3DEUNA15178ENC_PDF%26CatalogueNumber%3DEU-NA-15178-EN-C&usg=AFQjCNF_nKp1cL8yEMfoaiYrWGzvglHgaQ
- http://booksc.org/dl/22613330/32066e
In addition, you may refer to this similar issue: https://www.researchgate.net/post/When_undertaking_AFM_roughness_is_there_any_model_for_sampling_to_determine_the_number_of_points_and_measurements_to_take#view=58e640eb3d7f4be7e3323134
Hoping it will be helpfull
You can also take a look at ISO 4287 and 4288.
I remember there was a table referring to the required minimum profile length.
Good luck
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