with what else would you vent the chamber? - N2 is a highly stable molecule that does not oxidize or etch any samples within the chamber easily. It is also not corrosive and its behavior is close to that of air.
Johannes Gruenwald. Thanks but probably, but I made a mistake while asking this Question. Most of the time your sample is already in the atmosphere so It is going to oxidize anyway. I was thinking more about the aging of the chambers. Please correct me if I am wrong.
I pointed out several reasons above but, of course, you can vent your chamber with air, argon, or any other gas you like, in principle. However, if your process involves reactive gases that might still be in the chamber, nitrogen or any noble gas will do the trick.
Johannes Gruenwald Hi Thanks for your kind reply. Here I would like to point out that this is an evaporation chamber, not a plasma chamber (It was a mistake I could have pointed out earlier). Here let us say we evaporate only Al in the chamber and we open the chamber once everything is cold and it is in the solid form. In principle, nothing should happen in that case.
still, the points I made are valid but, of course, you can also vent the chamber with air - normally nitrogen is used because it doesn't react and nearly every lab has a nitrogen gas supply. If you use bottled gas, also no dust and dirt is sucked into the chamber.