Better than what alternative?
Do you want to evaporate an alloy or co-deposit using three sources?
e-beam deposition has several advantages and disadvantages over other methods, so the answer also depends on what elements you want to deposit, what film thickness you're aiming for, how important is the composition, etc.
For a good suggestion certain information is required. Laser ablation is a better option if you want a better control over the composition. Sputtering is another option for obtaining alloy films. Electron beam will not give you a good control over the composition especially the depth profile.
I have prepared a alloy by melting in the furnace process, now I want to deposit a thin film ( ~100 nm) of this alloy on Si substrate. So, I want to know that electron beam evaporation with single source is good or not for this purpose.
If the composition of the alloy is the intended composition of the film then you may not achieve the exact composition in the film. There may be composition gradient along the depth.
As mentioned above, the composition control may be challenging. There is no guarantee that the film will have the same composition as the target (you did not mention if it's important or not, but don't assume that you obtain the same).
Altogether it should at least be worth a try. e-beam evaporation can induce electronic defects and charges in insulators and semiconductors, so pending on your next steps this could be of relevance or not. It may be easier to answer your question with more details on the materials and the measurements you intend to do once you have the film.
Electron beam evaporation is a form of thermal evaporation. So the evaporation temperature of the alloy must be within or below the temperature generated by the electron beam. Otherwise you might have to choose sputtering. With regards to the composition and stoichiometry of the thin film, this can be best answered by actually making the thin film and performing an analysis ( like EDX ). Note that the substrate temperature also has an effect on the film composition.
I hope this comment helps.
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