In higher temperature around 1100 degree Celsius Si react with Pt and forming Pt3Si alloy. I want to dissolve this alloys or evaporate this. Can anybody help me for suggesting some solvent or any other option regarding evaporation. Thanks.
Carlos Araújo Queiroz
Triplatinum silicide (Pt3Si) can be dissolved (or etched) with a mixture of aqua regia with hydrofluoric acid (approx. 2:1 v/v).
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Carlos Araújo Queiroz
Possibly helpful patent reference:
H.E. Rhodes (Eastman Kodak Company), "Method of providing a pattern conductive platinum silicide", United States Patent, 4,804,438, Feb. 14, 1989.
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