We use sequential sonication of substrates using soap +DI water, DI water, acetone & IPA each for 30 min followed by a 25 min UV-ozone treatment.

https://www.youtube.com/watch?v=JbwkwO8YVXw

Hi Vikash !

A good method has been useful for me is the following:

Fisrt , place the substrates inside isopropanol in a crystallizer, into a ultrasonic bath, for 5 mins.

Next, put them in another crystallizer with acetona, again for 5 minutes (into the ultrasonic bath)

Then do the same, again for 5 minutes but with deionized water.

Finally, dry them with N2.

Regards !

You may want to check also the following somewhat related RG discussions:

https://www.researchgate.net/post/What_is_the_best_cleaning_procedures_for_ITO_substrates

https://www.researchgate.net/post/ITO_glass_substrates_cleaning

https://www.researchgate.net/post/What_is_the_best_way_to_clean_ITO_coated_glass_substrate