First of all to do TEM analysis of thin films , you should have all the tools to prepare the sample for TEM analysis: Ion milling, Dice cutter and Polishing etc. then only you can transfer the required film on the copper grid. As you said you can't use other substrate so firstly try to thin substrate in micron scale and then after ion milling, transfer it on copper grid.

Thank you Vinay Sir !!

Can you please guide us from where can we get the facility of  ion milling, nearest to Chandigarh or Delhi!!

NPL delhi.

Thank you Sir.