I'm currently working on TSV(through silicon via) modeling, and try to get the electrical parameters (RLC) from sentaurus simulation.
part of my sdevice code:
System {
# c1,c2 are two sides of tsv, c3 is grounded substrate contact.
TSV tsv_ (c1=f c2=m c3=b )
Vsource_pset vf ( f 0 ){ dc = 0 }
Vsource_pset vb ( b 0 ){ dc = 0 }
Vsource_pset vm ( m 0 ){ dc = 0 }
}
Solve {
#-a) zero solution
Poisson
Coupled { Poisson Electron Hole }
Quasistationary (
InitialStep=0.1 MaxStep=0.5 Minstep=1.e-5
Goal { Parameter=vf.dc Voltage=-3}
)
{ Coupled { Poisson Electron Hole } }
Quasistationary (
InitialStep=0.01 MaxStep=0.05 Minstep=1.e-5
Goal { Parameter=vf.dc Voltage=3}
)
{ ACCoupled (
StartFrequency=1e9 EndFrequency=1e9 NumberOfPoints=1 Decade
Node(f b m) Exclude(vf vb vm )
)
{ Poisson Electron Hole }
}
}
After done the sdevice simulation, using inspect two port network analysis to get the Z parameter of the structrue.
My question is:
1.Why the parameter i trying to get equals to the value of Z22, and in this case, what are the other parameters(Z11,Z12,Z21) stand for?
2.When i change the sequence of the "f b m" in "Node(f b m) Exclude(vf vb vm )", the result of Z parameter changes, WHY? and what is the right to define simulation port of two port network analysis in sentaurus?
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