How to remove the absorbed fluid layer from silicon dioxide?

09 December 2022 1 8K Report

Hi everyone. It is known that all Si-SiO2 wafers absorb the liquids around them due to their low hydrophobic properties. For some nanofabrication purposes, it is critical to have a sample free from this layer. Some people heat samples on the hotplate in air or vacuum to remove the fluid layer. Has anyone investigated how effective it is? Any good thoughts on this problem?

Thank you in advance!

James Garry

I've never worked with Si-SiO2 wafers, but when I've had to desiccate objects, warming in a hard vacuum (10^-4mbar and better) was the canonical method to 'bake out' the monolayer of water that is (unavoidably) present on metals that have seen ambient conditions.

It's worked for me more effectively than using short-wavelength UV to split the water.

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