I am trying to make silicon etch with KOH, using a silicone stamp similar to PDMS. So I did the manual bond between silicone stamp and silicon but when I put them in KOH solution they separate inmediatly and I tried to use HNO3 for oxidate silicon and improve the adhesion but it does not fix. TSomeone has an idea to generate this temporaly adhesion.
Thank you so much.
Plasma treatments on both substrates and PDMS. Then stick two parts together. It may work well.
Do you have a particular reason to use PDMS? I mean why not using lithography (e.g. Si3N4 layer on your silicon)?
Xuhua Wang Thank you for your answer.
Hamidreza Shirinkami , Really I'm using a comercial silicone silimar to PDMS not exactly that, but I'm trying to use soft lithography techniques because one of my objectives is use an easy and cheap fabrication method.
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