I have made EDX measurements using a software called IDFix (http://www.samx.eu/3.html) on a Quanta FEI 200 machine. The software saved all the measurements in a ".ana" file format.

Now, I do not have access to this software (it costs 18,000 euros). They do not even have a demo version, it seems. Is there any method by which I can open or export these ".ana" file so that I can plot the EDx spectra and do a quantitative analysis?

Has anyone used this IDFix software for EDS measurement? Any suggestions?

Thanks in advance

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