22 November 2022 0 8K Report

My film structure is STO(001)/LSMO(001)/HZO(111), the out-of-plane orientation of the epitaxially grown HZO film is (111), I want to use XRD to test the in-plane low-index orientation of the film, for example [100] or [010]. Since we need to find the low-index direction of the epitaxial HZO film in TEM and need FIB to cut the corresponding plane, how to determine this direction by XRD?

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