Hi everyone,
I am going to design a gdsii layout for a PhC device consisting of a modified W1 waveguide and a L3 cavity. I use freeware packages like KLayout and CNST Nanolithography toolbox.
Although, CNST has predefined layout for PhC and PhC waveguide, but it does not have a layout for PhC cavities.
Therefore, after designing the PhC layout, I did not have any choice except flattening the cell in order to be able to define the L3 cavity and modify the W1 waveguide.
However, the size of files increased a lot and if I want to define different structures in a file, the size of the file will increase a lot and the EBL software may encounter a problem.
I was wondering if someone has experiences regarding designing this type of structures to help me out?
Also I would like to know if the approach that I applied whether is correct or not?
Thank you in advance.
Your EBL computer should be able to handle fairly large files. My PhC preparation always invlolves flattening the files and the file size is generally not a problem.
K-Layout can be scripted (although I have no experience in scripting it), so you could always script the L3 cavity and the waveguide and use conditional statements to ensure that no hole is placed in the cavity. In this case you should be able to do so without flattening the structure, i.e. creat an element for your hole, then a script that places a copy of that element where needed.
Sebastian A Schulz
Thank you for the info.
But I am afraid working with the scripts in K-Layout is a bit complicated and time consuming.
However, I found an alternative solution and hopefully reduced the size significantly in a short period of time.
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