Ali Amiri I would recommend that good 'reference' values are best obtained from commercial products from reputed manufacturers. For example, you may look at datasheets of Analog Devices RF MEMS switches, or some other vendor, or even multiple vendors to get 'good' commercially acceptable values. You need to evaluate keeping frequency range and power in mind.

You may then decide your own target specs, based on your requirements and constraints. Hope it helps.

Dear Ali Amiri, in my opinion, it is important to evaluate the ON/OFF resistances of the switch.

Best regards,

Fabrício Simões

Power rating, operating temperature range, package.

Switching speed, preferable the delay from the 50% transition point of the digital control signal to the 10/90% RF levels.