Hello everyone,
I am new to MEMS sensors area. We have designed and developed a Gyroscope. However, I want to know that how can we measure the resonant frequency, Q-factor and sensitivity of fabricated sensor? Does the LDV (Laser Doppler Vibro.) works or we have to use spectrum analyzer or other device? Also how can we calculate or use the output of these devices if that would not not directly show the resonant freq and Q-factor? Also same applied to sensitivity. I would really appreciate any comment/recommendation
Hi,
I would recommend to do a set of experiments, where your gyroscope reaches the limits in its output range. If you know that your gyro has a frequency domain output, you must use a frequency meter/counter during experiments, once you have such data, it is easy to calculate the Q-factor, malvino's electronic principles gives a complete description about how to calculate Q-factor. Essentially, the resonant freq is related to the vibration of the body, you can read Beer's Vector Mechanics for Engineers, where a basic descrition of the relationship between natural frequency and vibration is given.
Dear Nadeem, you do not have any need to go for other instruments, by using LDV you measure resonance frequency for both drive and sense mode as well phase analysis. Once you receive resonance frequncy then calculate other parameters. For drive mode you need both ac and dc voltage so AC voltage supply willbe inbuilt in the LDV controller as well dc also. you can also use the DC power supply to provide much more dc voltage..You also can see inerferrometry of your gyro device by using LDV.
After measurement of resonance frequency, you just cross verify with your FEM simulations.
@ Hitesh Kumar: Thanks for your reply. As I am working in Korea so I will try to find the LDV here. BTW, where can I get the details that how to use it and especially interpret the output of LDV? is that simple?
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