Most EDX systems on SEMs will have the appropriate software to make the calculations. But beware, it is not a black box, you need to know what you are doing or it is easy to produce garbage. The theory is, very briefly, characteristic X-ray peak intensities are proportional to concentration of the element, these intensities need to be corrected for matrix effects and then compared to standards of known composition either real or virtual.
If you do not have the software try visiting the NIST site in the link for the DTSA-II package.
http://www.cstl.nist.gov/div837/837.02/epq/dtsa2/index.html
Most EDX systems on SEMs will have the appropriate software to make the calculations. But beware, it is not a black box, you need to know what you are doing or it is easy to produce garbage. The theory is, very briefly, characteristic X-ray peak intensities are proportional to concentration of the element, these intensities need to be corrected for matrix effects and then compared to standards of known composition either real or virtual.
If you do not have the software try visiting the NIST site in the link for the DTSA-II package.
http://www.cstl.nist.gov/div837/837.02/epq/dtsa2/index.html
Ian J Slipper, madam, please tell me what data we need for that software
All the information you need is on that website. I don't need to repeat it here.
http://www.cstl.nist.gov/div837/837.02/epq/dtsa2/index.html
Dear Samanta
From EDX Spectra you can only get information of different elements present in the sample.
The software attached with SEM will automatically give you the atomic %age of the element. You cannot yourself calculate the percentage.
So better to ask your SEM technician to provide %age detail along with the Spectra.
Dear Samantha ,
i also agree with Raminder answer ,pl find the ref EDX report ,you can ask equipment analyst /service enginer
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