Dear Saif Abdalla,

Please check the following papers and, if you need more information please let me know.

SERS Application

Article Hot-Spot Engineering in 3D Multi-Branched Nanostructures: Ul...

THz Application

Article Terahertz Dipole Nanoantenna Arrays: Resonance Characteristics

SEIRA Application

Article Gold Nanoantennas on a Pedestal for Plasmonic Enhancement in...

Dear Saif Abdalla

I recomned you chapter two of the

Handbook of Microlithography, Micromachining, and Microfabrication which you can read online via the link: https://books.google.com/books?hl=en&lr=&id=-kbT328H1XQC&oi=fnd&pg=PA139&dq=%22electron+beam+lithography%22&ots=BzdurqEXSP&sig=emgF3xxmtMC-40M-pHzuMXrvWEc#v=onepage&q=%22electron%20beam%20lithography%22&f=false

also the attached file.

I think that for you it could be nice to look at some books on nanofabrication.

there you can find whatever you need.

for example

https://www.elsevier.com/books/handbook-of-nanofabrication/wiederrecht/978-0-12-375176-8

I think that is a very simple question.

I recommend to start from some basic book on nanofabrication

for example : https://www.elsevier.com/books/handbook-of-nanofabrication/wiederrecht/978-0-12-375176-8

or: https://www.routledge.com/Nanofabrication-Handbook/Cabrini-Kawata/p/book/9780367381653

anyway if you check in google "electron beam lithography nanofabrication plasmonics" you can find tons of papers / review.

bests