Hi,

A glow discharge system like ELMO has a generic purpose to create plasma by ionizing gas/air in its chamber. This can be done either by applying high DC voltage across two plates/electrodes (Positive and negative) or by applying radio frequency (usually approx. 13MHz) across the electrodes. The applied (AC/DC) voltage ionizes the gas present in between the electrodes. I haven't seen ELMO but i have extensively used both the types of plasma systems (custom made in the laboratory) which are mentioned above. Over and above that we have a purchased Emitech plasma asher which is usually used for the similar and other applications as you are doing it. It works on Radio frequency based plasma formation principle. I guess as you were unable to find any polarity signifying electrodes in the ELMO system, i would suggest that it's working principle would be on Radio frequency based plasma formation. For further details you can refer to any references on the RF plasma generation technique and applications.

Regards

Thank you for your reply Amit. In fact we are trying to find the good parameters for particules deposition on substrate using this kind of technique but it's not very easy to find on internet. Any suggestions could be helpfull for us.

I m agree with prof Amit Morarka

You can read this link

http://www.agarscientific.com/elmo-glow-discharge-cleaning-system#:~:text=A%20Glow%20Discharge%20Cleaning%20System%20with%20specific%20gas%20atmosphere%20which,hydrophobic%2C%20negative%20or%20positive%20charge.