The straightforward way of converting probe current into ions per second (A-->C/s-->ion/s) and dividing by the beam area is giving me values much higher than usually quoted in literature.
Am I forgetting to consider some aspect of the rastering? I couldn't find any source describing this, among lots of papers and books about FIB.
Thanks in advance,
no I'm still one step behind... I need to estimate the ion dosage first before I can think of depth distribution. I thought it would be a straightforward calculation based on the current in pA and the beam size to get the flux, and then with the irradiation time I'd have the fluence and dosage. The problem is that these calculated values are usually 3 orders of magnitude different from the ones quoted in the papers.
my logics have been to convert amperes to ions/second considering each ion to be single charged, then to divide that by the beam area, getting (ions/cm²s). Then multiplying that flux by the exposition time to get dosage (ions/cm²). The common reported dosages of 10E5 ions/cm² would mean a probe current of some tenths of femtoamperes for a beam diameter of 100nm, which seems unusual.
ok I found where the confusion lied, it was on the typical exposure times that were much smaller than what I initially thought.
- Badges
- Science topic
- Similar topics
- Engineering
- Electrical Engineering
- Electrodes