I'm trying to produce samples with 6-7 spin-coated layers of V2O5. The first layer goes on great but when I apply the second layer it 'pulls' the first layer off.
Slides are cleaned using piranha and rinsed thoroughly with DI. They are dried at 150C for 30 minutes before the second coat is applied.
Hi Roxanna,
On what substrate are you applying the V2O5 spin coating? If you are using glass or silicon wafers it might be the intrinsic adhesion between the first layer of V2O5 and the substrate is not good enough (only physical bondin) and will be pulled off in the later process steps. If the V2O5 would make a chemical bond to the substrate this would help enormously. Consider adhesion promotors, baking alone is probably not good enough. If you would use Ti, Mo or Cr layer on glass these might stick to V2O5 after spin coating and a anneal step. Maybe 150C is enough, you have to fnd out what is the best anneal temperature.
best regards,
Peter
Hi Roxana,
I would certainly try this. It might be you get a more chemical bond due to diffusion of V2O5 in the glass or vice versa. It is well worth trying this before you change to something like adhesion layers. If you are planning to do optical measurements on the sample adhesion layers might no be an alternative anyway. Corning Cover glass is normally a sodium-calcium glass so diffusion is a good possibilty. But then you should go to considerable higher temperatures to make sure you have some diffusion. I would start at something like 350-400 C for at least 30-60 minutes. The glass should be able to withstand this. I would stick to your first temperature step for drying the layer and to get water and OH-groups out, then go to higher temperatures.
succes,
Peter
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