How can we use powder precursor (without dissolution) in MOCVD canister (bubbler)?

Soo Ho Choi @Soo-Choi-6

09 December 2020 1 9K Report

I have some questions about the use of some volatile powder in MOCVD system.

1. Could you provide some schematics for the gas delivery system in MOCVD?

2. How to keep the powder in the canister (bubbler)?

3. How can we maintain the pressure of the canister (bubbler)?

Frank T. Edelmann

Dear Soo Ho Choi thank you for your interesting technical question. To my knowledge you cannot just use a powder in an MOCVD bubbler unless you have high enough temperatures that the powder melts. For more general information about this please have a look at the following relevant research article entitled

Principles and applications of CVD powder technology

https://core.ac.uk/download/pdf/12039263.pdf

(see attached)

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