Have a look to KLayout editor to directly draw your mask(s) and get a GDS2 file (for fabrication of the mask)

Hello Nagarajan,

Further to Fabien's suggestion, a popular piece of software that I currently use is CleWin:

http://www.phoenixbv.com/product.php?prodid=50010105

There are many other such as LEdit:

http://www.mentor.com/tannereda/l-edit

and Layout Editor:

http://www.layouteditor.net/

Some people simply use CAD packages such as AutoCAD and then export as .GDS or .CIF or convert the files (i.e. from .DXF), but I have personally found this can lead to issues when importing to the DLW.

I hope this helps you.

On the LayoutEditor webpage, there is an interesting page with a description of many GDS tools (not only to get a layout, but also to draw 3D devices thanks to the masks' datas, like PovRay). Many of them are free.

http://www.layouteditor.net/links/

Just to mention that GDS II is a standard of micro-electronics (used in Cadence for instance), even for e-Beam lithography. So I suggest using tools that natively use this format (and avoid conversion issues and fees to convert your datas).

In case of a plastic mask (depending on the resolution you need), you can use another formats but first check the wanted format to print them and the resolution of the printer. For instance, I have used PNG files, generated by hand, or by a script (PHP and Matlab), PDF files (thanks to Matlab+LaTex to draw periodic patterns)... for maks where a resolution of 10 µm was enought (6400 DPI printer)

Hi,

You need a layout editor to draw your mask in a technology with a specific feature size to reach the required dimensions. This helps you to generate a gds2, or even oasis format file for mask fabrication.

Hi,

You can use CleWin software. It can help you.

you can use gdspy to make your mask. it is a python coding based module.