In my opinion, PEDOT coating might be useful. It can be applied to PDMS as a thin, transparent conductive layer using spin coating or dip coating. It is extremely conductive, making it easier to generate through-holes than ITO. Another option is to coat or transfer a 2D graphene layer onto PDMS. Graphene-based conductive films can be deposited onto PDMS and shaped using laser or photolithography, resulting in conductive, transparent layers with greater flexibility and tolerance for bending and stretching.

An alternative substrate you might consider is fluorine-doped tin oxide (FTO) glass. FTO glass shares many of the beneficial properties of ITO, such as high transparency and good electrical conductivity, but it is generally easier to work with when creating holes. Another option could be conducting polymers like polyaniline (PANI) or poly(3,4-ethylenedioxythiophene) (PEDOT). These materials can be deposited as thin films and offer good conductivity and flexibility. Or if applicable check with carbon paper or reduced graphene oxide sheets.

Sarada K Gopinathan Thank you for your answer.