I might be able to help but I need to know what you mean by internal reliability. Are you asking if each sub-scale is reliable as a measure of a defined dimension? If so you can analyse reliability in the usual ways treating the subscale as a scale. However, they are very short so you may have problems in that regard.
If you have a very big data set it would be better to do factor analysis on the whole questionnaire and see what it says about any possible dimensions. Anyway, I might be able to help more with more understanding of what you want to achieve.
As stated by other researchers you can check the reliability through Cronbach alpha test in SPSS. Also, to ensure the internal consistency, which comprises of Cronbach alpha and Composite reliability as per the articles based on SEM through Smart-PLS. you can check for composite reliability as well