In microwave, there is magnetron who will generate the waves. However, in RF generator, I am not really sure if this works similar principle in magnetron.
Microwave wave is nothing but high frequency RF waves. Now, it depends, where we require RF wave. Then decides, which microwave is going to be there. What is the frequency range does it need. That is also one factor which decides RF generator. Magnetron is used as a source. Ofcourse, all sources have same principal, only whether it is crossed field or linear beam, is important.
In microwaves the period is short so that in large devices the field reverses before electrons have traveled very far through the device. Magnetrons and other microwave tubes use the delay, and slow down a wave so that it stays with a beam of electrons, and do not work like traditional transistors. Microwave semiconductors such as transistors have to be small (at least in one dimension) if they are not to be inefficient or stop working at microwave frequencies. At lower frequencies electrons can travel further before the field reverses, so conventional or large transistors work and conventional circuits can be used to generate RF power.
Solid state devices such as Gunn diode, IMPATT diode, TRAPATT diode are also used for the generation of RF signal. These devices are working as negative resistance devices. The device operating in the negative resistance region generates a power (- I^2 R), the negative sign indicates the generation of power.
The solid state devices named above work because the transit time of the electrons is a significant fraction of a microwave cycle, rather than operating as conventional transistors.
You just mentioned RF waves without being specific about the frequency range. RF generally refers to electromagnetic energy in the LF (300KHz) to UHF(3GHz) region with microwave, millimeter waves, light, x-rays above that. In the RF region I defined, these waves are generally produced by solid-state and tube oscillators. An easy way to make an oscillator is to build a very high gain amplifier without compensation and more likely than not it will oscillate :)