My team and I at Guardion are working on a National Science Foundation grant building a new type of vacuum gauge based on novel nanomaterial technology. It will potentially be capable of operating in atmosphere to ultra high vacuum. We are new to Semicon and wanted to learn more about how vacuum gauges are incorporated in a fab ie. how many are used, what is the cost associated with them, maintenance requirements etc. My email is [email protected]. We really appreciate your help!
You need to be more specific because not every kind of gauge is suitable for every potential goal: in some cases the gauge type might negatively affect your experiment or the experiment might destroy the gauge. There are literally dozens of gauge types which might be considered so please be a bit more specific.
Agreed with Jurgen, I would also suggest reaching out to MKS and Brooks as these companies serve Semicon pressure management. They should have resources for various pressure gauge types, service notes, and applications that may be of help with your technology review! Good Luck!
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