High refractive index lossless Electron beam resists?

06 June 2018 0 4K Report

Hello,

Does anyone know of a high refractive index electron-beam patternable material? My wavelength of interest is visible and NIR (450 - 1100 nm) and ideally the refarctive index should be as high as possible.

All the usual electron-beam resists (PMMAs, Novolak based or styrene acrylates) have refractive indices less than 1.6 whereas I want something greater than 2.

Thanks a lot,

James

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