i cannot deliver any precise literature recommendation for you.
However, i remember having some conversation about this matter some time ago with a researcher from the Fraunhofer Institute for Interfacial Engineering and Biotechnology. You might wanna have a look there for a start. This might help.
Florian Doettinger I will take your advice. It's a good begining for me to understand the function of plasma. Thank you for your advice, appreciate it.