Have Au nanowires defined by EBL electron beam lithography, 100 nm across and 18 nm deep, contacted by contact wires that expand from that 100 nm width to 10 um wide over 10 um.

Want to clean them of organics using an oxygen RF plasma, was thinking 40 W of power for 1 minute at 1.0 sccm of O2. I'm worried about roughening of the Au surface however, even though the Au shouldn't oxidize at equilibrium. I'm concerned that could damage the nanowires.

If anyone has relevant experience, I'd appreciate it!

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