Do anybody have idea about development of SOI based capacitive presssure sensor?

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Can we perform CVD after TMAH? if not can anybody suggest me alternate way to get L layer deposited after TMAH. we don't have RIE/DRIE so.

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Phil Denby

It may assist if you could state what SOI is?

Rasim Nabiyev

International Journal of Engineering Sciences & Eme

rging Technologies, May 2011.

ISSN: 2231 – 6604

Volume 1, Issue

(PDF) SILICON ON INSULATOR TECHNOLOGY REVIEW. Available from: https://www.researchgate.net/publication/263889224_SILICON_ON_INSULATOR_TECHNOLOGY_REVIEW [accessed Feb 19 2019].