https://asu.pure.elsevier.com/en/publications/new-microfabrication-technology-for-producing-sensing-cells-for-m
Hi,
no, we did not, even if this technology is used for a long time for inclinometers with classical mechanis (not MEMS).
Here is my ùail, I'am very interested in your publication to see how it performs. Can you send me a link or copy for it ?
Thanks,
Olivier
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