Dear Sri Hari,

I don't belong to your domain of research. But I understand that you need guidance. I have some modest advice. Please look in the arXiv :

https://arxiv.org/find

In the window near the word "Title" type the phrase

Micro AND Electro

and then press on "Do search". You will get a lot of articles related with Micro Electro Mechanical Systems. Here are a few of the titles I saw:

Structural, magnetic and mechanical properties of 5 μ  m thick SmCo films for use in Micro-Electro-Mechanical-Systems (arXiv:0804.1992 [pdf])

High performance hard magnetic NdFeB thick films for integration into Micro-Electro-Mechanical-Systems (arXiv:cond-mat/0703785 [pdf])

I cannot know if these articles themselves are in the direction of your investigation, but you could contact the authors of the articles, tell them details about your particular direction of research and ask for basic material.

Good luck!