I am aware that ellipsometry, OWLS and QCM are some of the methods. Which will be the suitable method to analyze the deposition profile? Also, can I carry out analysis on the textile fabric?
i would suggest you to get cross section SEM image to obtain the profile. Based on what kind of quantification you are looking to do, you can change the analytical methods, few of which you have listed out. Also, i am not sure about the kind of deposit you have used, but you can also do EDX which is usually clubbed with SEM to obtain the composition profile.