So far with 3000 rpm I had approximately 100nm of BARLi thickness. And I want to achieve 150nm of thickness with spin coating. Therefore, either a suggestion for the spin speed value or a function between the aforementioned parameters, would be really helpful. Thank you very much in advance.
Hi Maria. It's difficult to answer with only one data point. It's also difficult to apply a spin speed calibration developed elsewhere to the particular spinner you're using since many variables (temperature, air flow, etc.) can affect thickness vs. spin speed.
You probably need to make a thickness vs. spin speed calibration curve. Several data points will probably be sufficient. Most likely, you are in a linear regime of thickness vs. spin speed and can get away with a linear fit. You should be able to predict the required speed pretty easily.
Hi Maria, I agree with Dr. Frantz's suggestions in that it would probably be best to generate your own calibration curve/profile of spin speed versus thickness, and since the thickness you need to achieve is not too far from what thickness you already achieved with the one spin condition you can probably approximate the dependence on RPM as a linear function and you will get close. I am not familiar with this type of antireflection coating and hence the materials that you are using, and mostly work with spin coating of sol-gel and nanoparticle films but these following references may be useful for you:
1. For polymer spin coating: Hall, B.; Underhill, P.; Torkelson, J. M.; Polymer Engineering and Science 1998, 38,
2039-2045
2. For nanoparticle spin coating: Rehg, T. J.; Higgins, B. G. AIChE J. 1992, 38, 489-501
All the best,
Jacob H. Prosser
Dear Mr Jesse Franz & Mr Jacob Prosser,
Thank you very much both, for your replies. I found them very useful as indeed, I did my own spin curve and after a fit, I approximately estimated the desired value of spin speed. Possibly,in order to confirm the result, I do a measurement with the help of the ellipsometer. I was just hoping that there would be a mathematical expression taking into account all the parameters that Mr Jesse Franz mentioned in his reply and giving me a function of spin speed VS thickness. In any case , the experimental way worked just fine too.
Thank you once more,
Kind regards,
Maria
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