Recently did some silane vapor treatment in a vacuum chamber and now want to use the chamber for something else. Do I need to clean it? If so, how?
If it's some time ago and the chamber wasn't without water their isn't any problem. The siloxane will be formed which is a polymer.
Article Analysis of silanes and of siloxanes formation by Raman spectroscopy
If the silane is not reacted in general ethanol is a good solvent. If the silane is only "adsorbed" onto the inner surface of the chamber ammonia vapor or Hydrochloric vapor is sufficient to lead to the non-reversible (if not using HF) reaction in minutes.
You need to explain if you added Silane (SiH4) to the inside of an XPS or Auger or SIMS analysis chamber, or if you added it to an exterior chamber.
Adding HF, HCl or NH3 to any chamber that has filaments or anodes or is used as the analysis chamber is rather dangerous because you do not know what will corrode. Be careful adding gases to analysis chambers.
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