Best resolution of atomic structure apparently was achieved by the Australian group using atomic beams and laser technique: http://physics.aps.org/featured-article-pdf/10.1103/PhysRevLett.110.213001. IBM already have atomic technology which able create the cartoon: http://en.wikipedia.org/wiki/A_Boy_and_His_Atom. Using a scanning tunneling microscope (SEM), carbon monoxide molecules were manipulated into place on a copper substrate with a copper needle at a distance of 1 nanometer. Finally TEM technique should have even better resolution than SEM. By the way the question already discussed in https://www.researchgate.net/post/What_is_the_difference_between_SEM_and_TEM_techniques2.