Parvaneh,

I have used high power polarizers from Rocky Mountain Instrument Company.

http://rmico.com/products/polarizers

You may wish to contact them with your application. Depending on the power of your 193-nm, you may need to get inventive with beam splitting / combining or pulse-stretching to decrease the incident power on the polarizer...

Good luck!

Mr Weaver,

thanks for your help, I'll check that Company's products.

but indeed, we need 193 nm polarized light for some high power applications, so we don't like to decrease the incident power at all!

Dear Parvaneh,

You can make a fairly cheap very high power polarizer by simply stacking quartz plates at the Brewster angle. Since the reflection coefficient for light which has electric field parallel to the plane of incidence goes to zero at the Brewster angle

you can take advantage of this by stacking plates to get purer and purer

polarization on successive passages through the plates.

Eight plates can get you approx. 85 % pure (see J. Chem. Phys. 107, p 1403 (1997)). More plates clearly improves this.

These polarizers can take the full power of an ArF laser. The only problem is that they are quite "bulky" for large beams.

Good Luck.