Might PI tape be a way to do this? You can also think of using a temprary glue to attach it to a holder and then remove/release the glass substrate later (e.g. photoresist, vacuum grease, etc).

Hi Peter,

Thanks for the suggestion. Sure, I will give it a try. 

good contact but difficult to remove: double sided conductive C pads for SEM stubs (but you will need to ensure they are not etched by you solution); 

another possibility: use a steel paper clip (if steel dissolves in your etch solution, coat with Au before use);

or; if you have something to hang it to: use teflon tape to fix everything in place 

There is all sorts of conducting tape commercially available (e.g. 3M). It is usually PI-polymer covered with a metal deposition (eg. Al, Ag).

Thank you Dr. Walther and Mr. Peter for your answers.