If I get it right, I think it depends on the software you use.

If you use Silvaco TCAD, you can check my answer on similar question here: https://www.researchgate.net/post/How_can_we_extract_the_data_from_Tonyplot_to_plot_the_graph_in_Origin

I use senturaus

hello ,

i think it is possible only in 1D , by doing a cut in the position you want and you have the curve concent (cm-3) = f ( depth ) to export it ,

goog luck