Yes you can use a DC power supply and an RLC to measure the the quality factor and the capacitance of the a capacitor and bias it till its breakdown voltage.
At first you bias the capacitor by the EDC voltage source in series with a high current limiting resistance which is made at the dame time large enough than the reactance of the capacitor. The RLC meter is connected across the capacitor through a coupling capacitor to prevent the passage of the DC current through the RLC meter. The reactance of the coupling capacitor must be much smaller than that of the reactance of the capacitor under test.
For performing the test you may follow the procedure used in the link:Method Measuring the small signal and switching parameters of diodes
a proper grounding prevents damage(s) of your LCR Meter[1,2].
Do you use/apply any high Voltage probe[3] in these/your measurements ?
1. Tips for Preventing Damage to 42841A and LCR Meters https://www.keysight.com/us/en/assets/7018-01844/technical-overviews/5989-8784.pdf
2. INTERFACING MICROMANIPULATOR PROBER TO HP4284A LCR METER https://www.micromanipulator.com/wp-content/uploads/2016/11/Micromanipulator-Application-Note-LCR-Measurements-With-4284A_0.pdf
3. High Voltage Probe https://www.sunelectronics.gr/index.php?SCREEN=products_detail&ProductID=1193945
Ioannis Samaras Thanks for the document. However, the experiment is yet to be executed, I am still trying to validate the needed equipment for the experiment. I am trying to run a RUL failure for AEC capacitors found in switched-mode power supply. I have the Hioki LCR meter and a twintex DC Supply and I am trying to achieve several approach(charging and discharging, Overvoltage, high temperature) and get the needed amount of data for training with machine learning/deep learning.